SEMI E100 : 2004(R2010)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 MM RETICLES
Published date
12-01-2013
Sorry this product is not available in your region.
Describes the Reticle SMIF Pod (RSP) used to transport and store 6 inch or 230 mm reticles in a reticle (photomask) or integrated circuit (IC) manufacturing facility.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E109 : 2017 | SPECIFICATION FOR RETICLE AND POD MANAGEMENT (RPMS) |
| SEMI E106 : 2004 | OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS |
| SEMI E117 : 2017 | SPECIFICATION FOR RETICLE LOAD PORT |
| SEMI S28 : 2011 | SAFETY GUIDELINE FOR ROBOTS AND LOAD PORTS INTENDED FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI E152 : 2014 | MECHANICAL SPECIFICATION OF EUV POD FOR 150 MM EUVL RETICLES |
| SEMI E19.4 : 2017 | SPECIFICATION FOR 200 MM STANDARD MECHANICAL INTERFACE (SMIF) |
| SEMI E1-9 : NOV 2006E | MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS |
| SEMI P5 : 2016 | SPECIFICATION FOR PELLICLES |
| SEMI E57 : 2000E2(R2010) | SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS |
| SEMI E47.1 : NOV 2006 | MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS |
| SEMI E30.1 : 2017 | SPECIFICATION FOR INSPECTION AND REVIEW SPECIFIC EQUIPMENT MODEL (ISEM) |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.