SEMI M8 : 2012
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON TEST WAFERS
Superseded date
16-11-2023
Published date
01-03-2012
Describes requirements for virgin silicon test wafers to be used for mechanical testing, and routine process monitoring in semiconductor manufacturing.
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