SEMI E4 : 1999(R2007)
Current
Current
The latest, up-to-date edition.
SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-1)
Published date
12-01-2013
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Provides a means for independent manufacturers to produce equipment and/or hosts which can be connected without requiring specific knowledge of each other.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Also available in CD-ROM. (02/2007)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI E30 : 2018 | SPECIFICATION FOR THE GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM) |
| SEMI E82 : 2006(R2018) | SPECIFICATION FOR INTERBAY/INTRABAY AMHS SEM (IBSEM) |
| SEMI E99 : 2017 | SPECIFICATION FOR CARRIER ID READER/WRITER |
| SEMI E118.1 : NOV 2004 | SPECIFICATION FOR SECS-1 AND SECS-2 PROTOCOL FOR WAFER ID READER COMMUNICATION INTERFACE STANDARDS |
| SEMI E104 : 2003 | SPECIFICATION FOR INTEGRATION AND GUIDELINE FOR CALIBRATION OF LOW-PRESSURE PARTICLE MONITOR |
| SEMI D27 : 2000 | GUIDE FOR FLAT PANEL DISPLAY EQUIPMENT COMMUNICATION INTERFACES |
| SEMI E99.1 : 2004(R2010) | SPECIFICATION FOR SECS-1 AND SECS-2 PROTOCOL FOR CARRIER ID READER/WRITER FUNCTIONAL STANDARD |
| SEMI E30.3 : 1998 | TESTING EQUIPMENT SPECIFIC EQUIPMENT MODEL (TESM) |
| SEMI E139.2 : 2008 | SECS-2 PROTOCOL FOR RECIPE AND PARAMETER MANAGEMENT (RAP) |
| SEMI E23 : 2004(R2010) | SPECIFICATION FOR CASSETTE TRANSFER PARALLEL I/O INTERFACE |
| SEMI E5 : 2017 | SPECIFICATION FOR SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-2) |
| SEMI E88 : 2007(R2018) | SPECIFICATION FOR AMHS STORAGE SEM (STOCKER SEM) |
| SEMI E173 : 2015 | SPECIFICATION FOR XML SECS-2 MESSAGE NOTATION (SMN) |
| SEMI E37 : 2013 | HIGH-SPEED SECS MESSAGE SERVICES (HSMS) GENERIC SERVICES |
| SEMI E30.2 : 1998 | HANDLER EQUIPMENT SPECIFIC EQUIPMENT MODEL (HSEM) |
| SEMI E6 : 2014 | GUIDE FOR SEMICONDUCTOR EQUIPMENT INSTALLATION DOCUMENTATION |
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