SEMI E87 : 2017
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR CARRIER MANAGEMENT (CMS)
08-11-2018
12-01-2013
Specifies a standardized behavior for host view communication with production equipment during the coordination, execution, and completion of automated and manual carrier transfers to and from the equipment and, if it exists, its internal buffer space.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Includes SEMI E87.1. (02/2009)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI E138 : 2017 | SPECIFICATION FOR XML SEMICONDUCTOR COMMON COMPONENTS |
| SEMI E146 : 2006 | TEST METHOD FOR THE DETERMINATION OF PARTICULATE CONTAMINATION FROM MINIENVIRONMENTS USED FOR STORAGE AND TRANSPORT OF SILICON WAFERS |
| SEMI E169 : 2015 | GUIDE FOR EQUIPMENT INFORMATION SYSTEM SECURITY |
| SEMI E99 : 2017 | SPECIFICATION FOR CARRIER ID READER/WRITER |
| SEMI E90 : 2012(R2018) | SPECIFICATION FOR SUBSTRATE TRACKING |
| SEMI E157 : 2011(R2016) | SPECIFICATION FOR MODULE PROCESS TRACKING |
| SEMI E98 : 2009 | PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM) |
| SEMI E174 : 2017 | SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM) |
| SEMI E130 : 2017 | SPECIFICATION FOR PROBER SPECIFIC EQUIPMENT MODEL FOR 300 MM ENVIRONMENT (PSEM300) |
| SEMI E118 : NOV 2004E | SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE - THE WAFER ID READER FUNCTIONAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE |
| SEMI E168 : 2015 | SPECIFICATION FOR PRODUCT TIME MEASUREMENT |
| SEMI E170 : DEC 2017 | SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS) |
| SEMI E87.1 : 2017 | PROVISIONAL SPECIFICATION FOR SECS-2 PROTOCOL FOR CARRIER MANAGEMENT (CMS) |
| SEMI E164 : 2014 | SPECIFICATION FOR EDA COMMON METADATA |
| SEMI HB4 : 2013 | SPECIFICATION OF COMMUNICATION INTERFACES FOR HIGH BRIGHTNESS LED MANUFACTURING EQUIPMENT (HB-LED ECI) |
| SEMI E84 : 2009(R2017) | SPECIFICATION FOR ENHANCED CARRIER HANDOFF PARALLEL I/O INTERFACE |
| SEMI E171 : FEB 2016 | SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL) |
| SEMI E147 : 2007E | GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA) |
| SEMI E110 : 2002(R2009) | GUIDELINE FOR INDICATOR PLACEMENT ZONE AND SWITCH PLACEMENT VOLUME OF LOAD PORT OPERATION INTERFACE FOR 300 MM LOAD PORTS |
| SEMI E99 : 2017 | SPECIFICATION FOR CARRIER ID READER/WRITER |
| SEMI E62 : NOV 2006(R2012) | SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS) |
| SEMI E15-1 : 2005(R2010) | SPECIFICATION FOR 300 MM TOOL LOAD PORT |
| SEMI E15 : 1998E2(R2016) | SPECIFICATION FOR TOOL LOAD PORT |
| SEMI E90 : 2012(R2018) | SPECIFICATION FOR SUBSTRATE TRACKING |
| SEMI E39 : 2003(R2014) | OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.