• Shopping Cart
    There are no items in your cart

EN 60204-33:2011

Current

Current

The latest, up-to-date edition.

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

Published date

04-03-2011

Sorry this product is not available in your region.

FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 General requirements
5 Incoming supply conductor terminations and
   devices for disconnecting and switching off
6 Protection against electric shock
7 Protection of equipment
8 Equipotential bonding
9 Control circuits, emergency off (EMO), and
   protective interlock circuits
10 Operator interfaces
11 Controlgear: location, mounting, and enclosures
12 Conductors and cables
13 Wiring practices
14 Electric motors and associated equipment
15 Accessories and lighting
16 Marking, warning signs and reference designations
17 Technical documentation
18 Testing
Annex A (normative) - Basic protection (protection
        against indirect contact) in TN-systems
Annex B (normative) - Protection against indirect contact
        in TT-systems (Derived from IEC 60364-4-41:2005
        and IEC 60364-6:2006)
Annex C (normative) - Conductor ampacity, and creepage
        and clearance distances
Annex D (normative) - Standard test fingers
Annex E (informative) - Types of system earthing (Derived
        from IEC 60364-1: 2005)
Bibliography
Annex ZA (normative) - Normative references to
         international publications with their
         corresponding European publications
Annex ZZ (informative) - Coverage of Essential Requirements
         of EC Directives

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

Committee
CLC/TC 44X
DocumentType
Standard
PublisherName
European Committee for Standards - Electrical
Status
Current

EN 60446:2007 Basic and safety principles for man-machine interface, marking and identification - Identification of conductors by colours or alphanumerics
IEC 60950-1:2005+AMD1:2009+AMD2:2013 CSV Information technology equipment - Safety - Part 1: General requirements
IEC 61800-3:2017 Adjustable speed electrical power drive systems - Part 3: EMC requirements and specific test methods
IEC 60364-5-54:2011 Low-voltage electrical installations - Part 5-54: Selection and erection of electrical equipment - Earthing arrangements and protective conductors
IEC 60038:2009 IEC standard voltages
IEC 60364-4-43:2008 Low-voltage electrical installations - Part 4-43: Protection for safety - Protection against overcurrent
IEC 61984:2008 Connectors - Safety requirements and tests
HD 60364-4-43:2010 Low-voltage electrical installations - Part 4-43: Protection for safety - Protection against overcurrent
IEC 60050-195:1998 International Electrotechnical Vocabulary (IEV) - Part 195: Earthing and protection against electric shock
IEC 60364-4-41:2005+AMD1:2017 CSV Low voltage electrical installations - Part 4-41: Protection for safety - Protection against electric shock
IEC 61000-6-2:2016 Electromagnetic compatibility (EMC) - Part 6-2: Generic standards - Immunity standard for industrial environments
IEC 60073:2002 Basic and safety principles for man-machine interface, marking and identification - Coding principles for indicators and actuators
EN 60073:2002 Basic and safety principles for man-machine interface, marking and identification - Coding principles for indicators and actuators
EN 61558-1:2005/A1:2009 SAFETY OF POWER TRANSFORMERS, POWER SUPPLIES, REACTORS AND SIMILAR PRODUCTS - PART 1: GENERAL REQUIREMENTS AND TESTS
IEC TR 62513:2008 Safety of machinery - Guidelines for the use of communication systems in safety-related applications
IEC 60050-441:1984 International Electrotechnical Vocabulary (IEV) - Part 441: Switchgear, controlgear and fuses
IEC 60204-1:2016 Safety of machinery - Electrical equipment of machines - Part 1: General requirements
IEC 60364-5-53:2001+AMD1:2002+AMD2:2015 CSV Electrical installations of buildings - Part 5-53: Selection and erection of electrical equipment - Isolation, switching and control
HD 60364-4-41:2017/A11:2017 LOW-VOLTAGE ELECTRICAL INSTALLATIONS - PART 4-41: PROTECTION FOR SAFETY - PROTECTION AGAINST ELECTRIC SHOCK
EN 60950-1:2006/A2:2013 INFORMATION TECHNOLOGY EQUIPMENT - SAFETY - PART 1: GENERAL REQUIREMENTS (IEC 60950-1:2005/A2:2013, MODIFIED)
IEC 61558-2-16:2009+AMD1:2013 CSV Safety of transformers, reactors, power supply units and similar products for supply voltages up to 1 100 V - Part 2-16: Particularrequirements and tests for switch mode power supply units andtransformers for switch mode power supply units
IEC 61310-3:2007 Safety of machinery - Indication, marking and actuation - Part 3: Requirements for the location and operation of actuators
ISO 13851:2002 Safety of machinery Two-hand control devices Functional aspects and design principles
IEC 60204-32:2008 Safety of machinery - Electrical equipment of machines - Part 32: Requirements for hoisting machines
IEC 61558-2-6:2009 Safety of transformers, reactors, power supply units and similar products for supply voltages up to 1 100 V - Part 2-6: Particular requirements and tests for safety isolating transformers and power supply units incorporating safety isolating transformers
IEC TR 61000-5-2:1997 Electromagnetic compatibility (EMC) - Part 5: Installation and mitigation guidelines - Section 2: Earthing and cabling
IEC 61082-1:2014 RLV Preparation of documents used in electrotechnology - Part 1: Rules
IEC 60050-442:1998 International Electrotechnical Vocabulary (IEV) - Part 442: Electrical accessories
EN 61557-3:2007 Electrical safety in low voltage distribution systems up to 1 000 V a.c. and 1 500 V d.c. - Equipment for testing, measuring or monitoring of protective measures - Part 3: Loop impedance
IEC 61000-6-3:2006+AMD1:2010 CSV Electromagnetic compatibility (EMC) - Part 6-3: Generic standards - Emission standard for residential, commercial and light-industrial environments
IEC 60364-6:2016 Low voltage electrical installations - Part 6: Verification
EN 60447:2004 Basic and safety principles for man-machine interface, marking and identification - Actuating principles
IEC 61558-1:2017 Safety of transformers, reactors, power supply units and combinations thereof - Part 1: General requirements and tests
EN 61800-5-1:2007/A1:2017 ADJUSTABLE SPEED ELECTRICAL POWER DRIVE SYSTEMS - PART 5-1: SAFETY REQUIREMENTS - ELECTRICAL, THERMAL AND ENERGY (IEC 61800-5-1:2007/A1:2016)
IEC 60447:2004 Basic and safety principles for man-machine interface, marking and identification - Actuating principles
EN 60034-11:2004 Rotating electrical machines - Part 11: Thermal protection
IEC 60529:1989+AMD1:1999+AMD2:2013 CSV Degrees of protection provided by enclosures (IP Code)
IEC 60695-11-10:2013 Fire hazard testing - Part 11-10: Test flames - 50 W horizontal and vertical flame test methods
EN 62061:2005/A2:2015 SAFETY OF MACHINERY - FUNCTIONAL SAFETY OF SAFETY-RELATED ELECTRICAL, ELECTRONIC AND PROGRAMMABLE ELECTRONIC CONTROL SYSTEMS (IEC 62061:2005/A2:2015)
EN 61032:1998 Protection of persons and equipment by enclosures - Probes for verification
IEC 60439-1:1999+AMD1:2004 CSV Low-voltage switchgear and controlgear assemblies - Part 1: Type-tested and partially type-tested assemblies
ISO 12100-2:2003 Safety of machinery Basic concepts, general principles for design Part 2: Technical principles
IEC 60034-1:2017 Rotating electrical machines - Part 1: Rating and performance
IEC 61000-6-1:2016 Electromagnetic compatibility (EMC) - Part 6-1: Generic standards - Immunity standard for residential, commercial and light-industrial environments
IEC 61496-1:2012 Safety of machinery - Electro-sensitive protective equipment - Part 1: General requirements and tests
IEC 61000-6-4:2006+AMD1:2010 CSV Electromagnetic compatibility (EMC) - Part 6-4: Generic standards - Emission standard for industrial environments
HD 516 S2:1997/A2:2008 GUIDE TO USE OF LOW VOLTAGE HARMONIZED CABLES
ISO 3864-1:2011 Graphical symbols Safety colours and safety signs Part 1: Design principles for safety signs and safety markings
IEC 60050-826:2004 International Electrotechnical Vocabulary (IEV) - Part 826: Electrical installations
ISO 12100-1:2003 Safety of machinery Basic concepts, general principles for design Part 1: Basic terminology, methodology
ISO 13850:2015 Safety of machinery Emergency stop function Principles for design
IEC 60947-5-2:2007+AMD1:2012 CSV Low-voltage switchgear and controlgear - Part 5-2: Control circuitdevices and switching elements - Proximity switches
EN 61558-2-6:2009 Safety of transformers, reactors, power supply units and similar products for supply voltages up to 1 100 V - Part 2-6: Particular requirements and tests for safety isolating transformers and power supply units incorporating safety isolating transformers
IEC 61310-1:2007 Safety of machinery - Indication, marking and actuation - Part 1: Requirements for visual, acoustic and tactile signals
IEC 60947-3:2008+AMD1:2012+AMD2:2015 CSV Low-voltage switchgear and controlgear - Part 3: Switches, disconnectors, switch-disconnectors and fuse-combination units
IEC 61439-1:2011 Low-voltage switchgear and controlgear assemblies - Part 1: General rules
SEMI S1 : 2015 SAFETY GUIDELINE FOR EQUIPMENT SAFETY LABELS
EN 61010-1:2010 Safety requirements for electrical equipment for measurement, control, and laboratory use - Part 1: General requirements
IEC 60947-2:2016 Low-voltage switchgear and controlgear - Part 2: Circuit-breakers
EN 60529:1991/AC:2016-12 DEGREES OF PROTECTION PROVIDED BY ENCLOSURES (IP CODE) (IEC 60529 EDITION 2.2 CORRIGENDUM 2:2015)
IEC 62061:2005+AMD1:2012+AMD2:2015 CSV Safety of machinery - Functional safety of safety-related electrical, electronic and programmable electronic control systems
IEC 61140:2016 Protection against electric shock - Common aspects for installation and equipment
IEC 61032:1997 Protection of persons and equipment by enclosures - Probes for verification
IEC 60309-1:1999+AMD1:2005+AMD2:2012 CSV Plugs, socket-outlets and couplers for industrial purposes - Part 1: General requirements
IEC 61010-1:2010+AMD1:2016 CSV Safety requirements for electrical equipment for measurement, control, and laboratory use - Part 1: General requirements
IEC TS 62046:2008 Safety of machinery - Application of protective equipment to detect the presence of persons
ISO 13849-1:2015 Safety of machinery — Safety-related parts of control systems — Part 1: General principles for design
EN 61310-1:2008 Safety of machinery - Indication, marking and actuation - Part 1: Requirements for visual, acoustic and tactile signals
IEC 60445:2017 Basic and safety principles for man-machine interface, marking and identification - Identification of equipment terminals, conductor terminations and conductors
IEC 61557-3:2007 Electrical safety in low voltage distribution systems up to 1 000 V a.c. and 1 500 V d.c. - Equipment for testing, measuring or monitoring of protective measures - Part 3: Loop impedance

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.