I.S. EN 60204-33:2011
Current
The latest, up-to-date edition.
SAFETY OF MACHINERY - ELECTRICAL EQUIPMENT OF MACHINES - PART 33: REQUIREMENTS FOR SEMICONDUCTOR FABRICATION EQUIPMENT
Hardcopy , PDF
English
01-01-2011
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FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 General requirements
5 Incoming supply conductor terminations and
devices for disconnecting and switching off
6 Protection against electric shock
7 Protection of equipment
8 Equipotential bonding
9 Control circuits, emergency off (EMO), and
protective interlock circuits
10 Operator interfaces
11 Controlgear: location, mounting, and enclosures
12 Conductors and cables
13 Wiring practices
14 Electric motors and associated equipment
15 Accessories and lighting
16 Marking, warning signs and reference designations
17 Technical documentation
18 Testing
Annex A (normative) - Basic protection (protection
against indirect contact) in TN-systems
Annex B (normative) - Protection against indirect contact
in TT-systems (Derived from IEC 60364-4-41:2005
and IEC 60364-6:2006)
Annex C (normative) - Conductor ampacity, and creepage
and clearance distances
Annex D (normative) - Standard test fingers
Annex E (informative) - Types of system earthing (Derived
from IEC 60364-1: 2005)
Bibliography
Annex ZA (normative) - Normative references to
international publications with their
corresponding European publications
Annex ZZ (informative) - Coverage of Essential Requirements
of EC Directives
Pertains to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
| DevelopmentNote |
For CENELEC adoptions of IEC publications, please check www.iec.ch to be sure that you have any corrigenda that may apply. (01/2017)
|
| DocumentType |
Standard
|
| Pages |
132
|
| PublisherName |
National Standards Authority of Ireland
|
| Status |
Current
|
| Standards | Relationship |
| EN 60204-33:2011 | Identical |
| EN 60446:2007 | Basic and safety principles for man-machine interface, marking and identification - Identification of conductors by colours or alphanumerics |
| IEC 60950-1:2005+AMD1:2009+AMD2:2013 CSV | Information technology equipment - Safety - Part 1: General requirements |
| IEC 61800-3:2017 | Adjustable speed electrical power drive systems - Part 3: EMC requirements and specific test methods |
| IEC 60364-5-54:2011 | Low-voltage electrical installations - Part 5-54: Selection and erection of electrical equipment - Earthing arrangements and protective conductors |
| IEC 60038:2009 | IEC standard voltages |
| IEC 60364-4-43:2008 | Low-voltage electrical installations - Part 4-43: Protection for safety - Protection against overcurrent |
| IEC 61984:2008 | Connectors - Safety requirements and tests |
| HD 60364-4-43:2010 | Low-voltage electrical installations - Part 4-43: Protection for safety - Protection against overcurrent |
| IEC 60050-195:1998 | International Electrotechnical Vocabulary (IEV) - Part 195: Earthing and protection against electric shock |
| IEC 60364-4-41:2005+AMD1:2017 CSV | Low voltage electrical installations - Part 4-41: Protection for safety - Protection against electric shock |
| IEC 60073:2002 | Basic and safety principles for man-machine interface, marking and identification - Coding principles for indicators and actuators |
| EN 60073:2002 | Basic and safety principles for man-machine interface, marking and identification - Coding principles for indicators and actuators |
| EN 61558-1:2005/A1:2009 | SAFETY OF POWER TRANSFORMERS, POWER SUPPLIES, REACTORS AND SIMILAR PRODUCTS - PART 1: GENERAL REQUIREMENTS AND TESTS |
| IEC TR 62513:2008 | Safety of machinery - Guidelines for the use of communication systems in safety-related applications |
| IEC 60050-441:1984 | International Electrotechnical Vocabulary (IEV) - Part 441: Switchgear, controlgear and fuses |
| IEC 60204-1:2016 | Safety of machinery - Electrical equipment of machines - Part 1: General requirements |
| IEC 60364-5-53:2001+AMD1:2002+AMD2:2015 CSV | Electrical installations of buildings - Part 5-53: Selection and erection of electrical equipment - Isolation, switching and control |
| HD 60364-4-41:2017/A11:2017 | LOW-VOLTAGE ELECTRICAL INSTALLATIONS - PART 4-41: PROTECTION FOR SAFETY - PROTECTION AGAINST ELECTRIC SHOCK |
| EN 60950-1:2006/A2:2013 | INFORMATION TECHNOLOGY EQUIPMENT - SAFETY - PART 1: GENERAL REQUIREMENTS (IEC 60950-1:2005/A2:2013, MODIFIED) |
| IEC 61558-2-16:2009+AMD1:2013 CSV | Safety of transformers, reactors, power supply units and similar products for supply voltages up to 1 100 V - Part 2-16: Particularrequirements and tests for switch mode power supply units andtransformers for switch mode power supply units |
| IEC 61310-3:2007 | Safety of machinery - Indication, marking and actuation - Part 3: Requirements for the location and operation of actuators |
| ISO 13851:2002 | Safety of machinery Two-hand control devices Functional aspects and design principles |
| IEC 60204-32:2008 | Safety of machinery - Electrical equipment of machines - Part 32: Requirements for hoisting machines |
| IEC TR 61000-5-2:1997 | Electromagnetic compatibility (EMC) - Part 5: Installation and mitigation guidelines - Section 2: Earthing and cabling |
| IEC 61082-1:2014 RLV | Preparation of documents used in electrotechnology - Part 1: Rules |
| IEC 60050-442:1998 | International Electrotechnical Vocabulary (IEV) - Part 442: Electrical accessories |
| EN 61557-3:2007 | Electrical safety in low voltage distribution systems up to 1 000 V a.c. and 1 500 V d.c. - Equipment for testing, measuring or monitoring of protective measures - Part 3: Loop impedance |
| IEC 61000-6-3:2006+AMD1:2010 CSV | Electromagnetic compatibility (EMC) - Part 6-3: Generic standards - Emission standard for residential, commercial and light-industrial environments |
| IEC 60364-6:2016 | Low voltage electrical installations - Part 6: Verification |
| EN 60447:2004 | Basic and safety principles for man-machine interface, marking and identification - Actuating principles |
| IEC 61558-1:2017 | Safety of transformers, reactors, power supply units and combinations thereof - Part 1: General requirements and tests |
| EN 61800-5-1:2007/A1:2017 | ADJUSTABLE SPEED ELECTRICAL POWER DRIVE SYSTEMS - PART 5-1: SAFETY REQUIREMENTS - ELECTRICAL, THERMAL AND ENERGY (IEC 61800-5-1:2007/A1:2016) |
| IEC 60447:2004 | Basic and safety principles for man-machine interface, marking and identification - Actuating principles |
| EN 60034-11:2004 | Rotating electrical machines - Part 11: Thermal protection |
| IEC 60529:1989+AMD1:1999+AMD2:2013 CSV | Degrees of protection provided by enclosures (IP Code) |
| IEC 60695-11-10:2013 | Fire hazard testing - Part 11-10: Test flames - 50 W horizontal and vertical flame test methods |
| EN 62061:2005/A2:2015 | SAFETY OF MACHINERY - FUNCTIONAL SAFETY OF SAFETY-RELATED ELECTRICAL, ELECTRONIC AND PROGRAMMABLE ELECTRONIC CONTROL SYSTEMS (IEC 62061:2005/A2:2015) |
| EN 61032:1998 | Protection of persons and equipment by enclosures - Probes for verification |
| IEC 60439-1:1999+AMD1:2004 CSV | Low-voltage switchgear and controlgear assemblies - Part 1: Type-tested and partially type-tested assemblies |
| ISO 12100-2:2003 | Safety of machinery Basic concepts, general principles for design Part 2: Technical principles |
| IEC 60034-1:2017 | Rotating electrical machines - Part 1: Rating and performance |
| IEC 61496-1:2012 | Safety of machinery - Electro-sensitive protective equipment - Part 1: General requirements and tests |
| HD 516 S2:1997/A2:2008 | GUIDE TO USE OF LOW VOLTAGE HARMONIZED CABLES |
| ISO 3864-1:2011 | Graphical symbols Safety colours and safety signs Part 1: Design principles for safety signs and safety markings |
| IEC 60050-826:2004 | International Electrotechnical Vocabulary (IEV) - Part 826: Electrical installations |
| ISO 12100-1:2003 | Safety of machinery Basic concepts, general principles for design Part 1: Basic terminology, methodology |
| ISO 13850:2015 | Safety of machinery Emergency stop function Principles for design |
| IEC 60947-5-2:2007+AMD1:2012 CSV | Low-voltage switchgear and controlgear - Part 5-2: Control circuitdevices and switching elements - Proximity switches |
| EN 61558-2-6:2009 | Safety of transformers, reactors, power supply units and similar products for supply voltages up to 1 100 V - Part 2-6: Particular requirements and tests for safety isolating transformers and power supply units incorporating safety isolating transformers |
| IEC 61310-1:2007 | Safety of machinery - Indication, marking and actuation - Part 1: Requirements for visual, acoustic and tactile signals |
| IEC 60947-3:2008+AMD1:2012+AMD2:2015 CSV | Low-voltage switchgear and controlgear - Part 3: Switches, disconnectors, switch-disconnectors and fuse-combination units |
| IEC 61439-1:2011 | Low-voltage switchgear and controlgear assemblies - Part 1: General rules |
| SEMI S1 : 2015 | SAFETY GUIDELINE FOR EQUIPMENT SAFETY LABELS |
| EN 61010-1:2010 | Safety requirements for electrical equipment for measurement, control, and laboratory use - Part 1: General requirements |
| IEC 60947-2:2016 | Low-voltage switchgear and controlgear - Part 2: Circuit-breakers |
| EN 60529:1991/AC:2016-12 | DEGREES OF PROTECTION PROVIDED BY ENCLOSURES (IP CODE) (IEC 60529 EDITION 2.2 CORRIGENDUM 2:2015) |
| IEC 62061:2005+AMD1:2012+AMD2:2015 CSV | Safety of machinery - Functional safety of safety-related electrical, electronic and programmable electronic control systems |
| IEC 61140:2016 | Protection against electric shock - Common aspects for installation and equipment |
| IEC 61032:1997 | Protection of persons and equipment by enclosures - Probes for verification |
| IEC 60309-1:1999+AMD1:2005+AMD2:2012 CSV | Plugs, socket-outlets and couplers for industrial purposes - Part 1: General requirements |
| IEC 61010-1:2010+AMD1:2016 CSV | Safety requirements for electrical equipment for measurement, control, and laboratory use - Part 1: General requirements |
| IEC TS 62046:2008 | Safety of machinery - Application of protective equipment to detect the presence of persons |
| ISO 13849-1:2015 | Safety of machinery — Safety-related parts of control systems — Part 1: General principles for design |
| EN 61310-1:2008 | Safety of machinery - Indication, marking and actuation - Part 1: Requirements for visual, acoustic and tactile signals |
| IEC 60445:2017 | Basic and safety principles for man-machine interface, marking and identification - Identification of equipment terminals, conductor terminations and conductors |
| IEC 61557-3:2007 | Electrical safety in low voltage distribution systems up to 1 000 V a.c. and 1 500 V d.c. - Equipment for testing, measuring or monitoring of protective measures - Part 3: Loop impedance |
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