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IEC 60204-33:2009

Current

Current

The latest, up-to-date edition.

Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Language(s)

English - French

Published date

10-12-2009

€415.86
Excluding VAT

IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.

DevelopmentNote
Stability Date: 2017. (09/2017)
DocumentType
Standard
Pages
247
PublisherName
International Electrotechnical Committee
Status
Current

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