SEMI E15-1 : 2005(R2010)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR 300 MM TOOL LOAD PORT
Published date
12-01-2013
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Describes dimensional requirements for the load ports of 300 mm wafer process and inspection equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (03/2003) No longer published within the SEMI E15 family of standards. Published and sold separately on its own page. (07/2010)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI E72 : 2016 | SPECIFICATION AND GUIDE FOR 300 MM EQUIPMENT FOOTPRINT, HEIGHT, AND WEIGHT |
| SEMI E119 : JUL 2006(R2012) | MECHANICAL SPECIFICATION FOR REDUCED-PITCH FRONT-OPENING BOX FOR INTERFACTORY TRANSPORT OF 300 MM WAFERS |
| SEMI E87 : 2017 | SPECIFICATION FOR CARRIER MANAGEMENT (CMS) |
| SEMI G82 : 2015 | SPECIFICATION FOR 300 MM LOAD PORT FOR FRAME CASSETTES IN BACKEND PROCESS |
| SEMI E98 : 2009 | PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM) |
| SEMI E83 : 2015 | SPECIFICATION FOR PGV MECHANICAL DOCKING FLANGE |
| SEMI E85 : 2008(R2013) | SPECIFICATION FOR PHYSICAL AMHS STOCKER TO INTERBAY TRANSPORT SYSTEM INTEROPERABILITY |
| SEMI E87.1 : 2017 | PROVISIONAL SPECIFICATION FOR SECS-2 PROTOCOL FOR CARRIER MANAGEMENT (CMS) |
| SEMI E64 : 2005(R2012) | SPECIFICATION FOR 300 MM CART TO SEMI E15.1 DOCKING INTERFACE PORT |
| SEMI M31 : 2008 | MECHANICAL SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 300 MM WAFERS |
| SEMI E131 : 2004(R2010) | SPECIFICATION FOR THE PHYSICAL INTERFACE OF AN INTEGRATED MEASUREMENT MODULE (IMM) INTO 300 MM TOOLS USING BOLTS-M |
| SEMI E117 : 2017 | SPECIFICATION FOR RETICLE LOAD PORT |
| SEMI E63 : 2016 | SPECIFICATION FOR 300 MM BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE |
| SEMI E84 : 2009(R2017) | SPECIFICATION FOR ENHANCED CARRIER HANDOFF PARALLEL I/O INTERFACE |
| SEMI E171 : FEB 2016 | SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL) |
| SEMI E47.1 : NOV 2006 | MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS |
| SEMI S17 : 2013 | SAFETY GUIDELINE FOR UNMANNED TRANSPORT VEHICLE (UTV) SYSTEMS |
| SEMI E101 : 2004(R2010) | GUIDE FOR EFEM FUNCTIONAL STRUCTURE MODEL |
| SEMI E1-9 : NOV 2006E | MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS |
| SEMI E62 : NOV 2006(R2012) | SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS) |
| SEMI E57 : 2000E2(R2010) | SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS |
| SEMI E15 : 1998E2(R2016) | SPECIFICATION FOR TOOL LOAD PORT |
| SEMI E47.1 : NOV 2006 | MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS |
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