SEMI E39 : 2003(R2014)
Current
Current
The latest, up-to-date edition.
OBJECT SERVICES STANDARD: CONCEPTS, BEHAVIOUR, AND SERVICES
Published date
12-01-2013
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Specifies general terminology, conventions, and notation for describing behavior and data in terms of objects and object attributes.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Includes SEMI E39.1. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E54.13 : 2011 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR ETHERNET/IP(TM) |
| SEMI E54.24 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL OF A GENERIC EQUIPMENT NETWORKED SENSOR (GENSEN) |
| SEMI E58 : JUL 2003 | AUTOMATED RELIABILITY, AVAILABILITY, AND MAINTAINABILITY STANDARD (ARAMS): CONCEPTS, BEHAVIOR, AND SERVICES |
| SEMI E116.1 : 2007 | SPECIFICATION FOR SECS-2 PROTOCOL FOR EQUIPMENT PERFORMANCE TRACKING (EPT) |
| SEMI E109 : 2017 | SPECIFICATION FOR RETICLE AND POD MANAGEMENT (RPMS) |
| SEMI T12 : 2010 | SPECIFICATION FOR TRACING JIGS AND IMPLEMENTS |
| SEMI E99 : 2017 | SPECIFICATION FOR CARRIER ID READER/WRITER |
| SEMI E116 : 2017 | SPECIFICATION FOR EQUIPMENT PERFORMANCE TRACKING |
| SEMI E90 : 2012(R2018) | SPECIFICATION FOR SUBSTRATE TRACKING |
| SEMI E39.1 : 2003(R2014) | SECS-2 PROTOCOL FOR OBJECT SERVICES STANDARD (OSS) |
| SEMI E54.3 : 1998(R2016) | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR MASS FLOW DEVICE |
| SEMI E87 : 2017 | SPECIFICATION FOR CARRIER MANAGEMENT (CMS) |
| SEMI E54.17 : 2006(R2011) | SPECIFICATION OF SENSOR/ACTUATOR NETWORK FOR A-LINK |
| SEMI E54.11 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR ENDPOINT DEVICES |
| SEMI E98.1 : NOV 2002(R2009) | PROVISIONAL SPECIFICATION FOR SECS-2 PROTOCOL FOR THE OBJECT-BASED EQUIPMENT MODEL |
| SEMI D54 : 2009E | SPECIFICATION FOR SUBSTRATE MANAGEMENT OF FPD PRODUCTION (SMS-FPD) |
| SEMI E54.16 : 2006 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR LONWORKS |
| SEMI E54.12 : 2014 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR CC-LINK |
| SEMI E98 : 2009 | PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM) |
| SEMI E54.14 : 2009 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR PROFINET |
| SEMI E54.8 : 2009 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR PROFIBUS-DP |
| SEMI E174 : 2017 | SPECIFICATION FOR WAFER JOB MANAGEMENT (WJM) |
| SEMI E53 : 2004 | EVENT REPORTING |
| SEMI T17 :2006(R2018) | SPECIFICATION OF SUBSTRATE TRACEABILITY |
| SEMI E54.18 : 2014 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PUMP DEVICE |
| SEMI E118 : NOV 2004E | SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE - THE WAFER ID READER FUNCTIONAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE |
| SEMI E125 : 2014 | SPECIFICATION FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E170 : DEC 2017 | SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS) |
| SEMI E127.1 : 2008 | SPECIFICATION FOR SECS-2 PROTOCOL FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS (IMMC) |
| SEMI E53.1 : 2004 | SECS-2 SUPPORT FOR EVENT REPORTING STANDARD |
| SEMI T13.1 : 2004(R2010) | SPECIFICATION FOR SECS PROTOCOL FOR DEVICE TRACKING |
| SEMI E164 : 2014 | SPECIFICATION FOR EDA COMMON METADATA |
| SEMI E54.23 : 2013 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR CC-LINK IE FIELD NETWORK |
| SEMI E54.22 : 2014 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE GAUGES |
| SEMI E54.20 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR ETHERCAT |
| SEMI E40 : 2013 | STANDARD FOR PROCESSING MANAGEMENT |
| SEMI E171 : FEB 2016 | SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL) |
| SEMI E54.19 : 2008(R2014) | SPECIFICATION OF SENSOR/ACUTUATOR NETWORK FOR MECHATROLINK |
| SEMI E54.15 : 2007 | SENSOR ACTUATOR NETWORK COMMUNICATION SPECIFICATION FOR SAFETYBUS P |
| SEMI T12.1 : 2004(R2010) | SPECIFICATION FOR SECS PROTOCOL FOR TRACKING JIGS AND IMPLEMENTS |
| SEMI E147 : 2007E | GUIDE FOR EQUIPMENT DATA ACQUISITION (EDA) |
| SEMI E125.1 : 2014 | SPECIFICATION FOR SOAP BINDING FOR EQUIPMENT SELF DESCRIPTION (EQSD) |
| SEMI E54 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK |
| SEMI E148 : 2009(R2014) | SPECIFICATION FOR TIME SYNCHRONIZATION AND DEFINITION OF THE TS-CLOCK OBJECT |
| SEMI E94 : 2014 | SPECIFICATION FOR CONTROL JOB MANAGEMENTT |
| SEMI E127 : 2008 | SPECIFICATION FOR INTEGRATED MEASUREMENT MODULE COMMUNICATIONS: CONCEPTS, BEHAVIOR, AND SERVICES (IMMC) |
| SEMI E54.4 : 2016 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR DEVICENET |
| SEMI E54.10 : 2000(R2017) | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK SPECIFIC DEVICE MODEL FOR AN IN-SITU PARTICLE MONITOR DEVICE |
| SEMI E54.9 : 2008 | SPECIFICATION FOR SENSOR/ACTUATOR NETWORK COMMUNICATION FOR MODBUS/TCP OVER TCP/IP |
| SEMI E142 : MAR 2006 | SPECIFICATION FOR SUBSTRATE MAPPING |
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