SEMI E1-9 : NOV 2006E
Current
Current
The latest, up-to-date edition.
MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS
Published date
12-01-2013
Describes the cassettes used to transport and store 300 mm wafers in an IC manufacturing facility. Also intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at all mechanical interfaces.
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