SEMI E15 : 1998E2(R2016)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR TOOL LOAD PORT
Published date
12-01-2013
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Pertains to unify the interface between process/inspection tools and automated wafer carrier transport systems while maintaining compatibility with human transport.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) E = This specification was editorially modified in November 2004 to correct an editorial error. (02/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI M31 : 2008 | MECHANICAL SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 300 MM WAFERS |
| SEMI E146 : 2006 | TEST METHOD FOR THE DETERMINATION OF PARTICULATE CONTAMINATION FROM MINIENVIRONMENTS USED FOR STORAGE AND TRANSPORT OF SILICON WAFERS |
| SEMI E57 : 2000E2(R2010) | SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS |
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| SEMI G77 : 1999(R2015) | SPECIFICATION FOR FRAME CASSETTE FOR 300 MM WAFERS |
| SEMI D17 : 2000 | MECHANICAL SPECIFICATION FOR CASSETTES USED TO SHIP FLAT PANEL DISPLAY GLASS SUBSTRATES |
| SEMI E106 : 2004 | OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS |
| SEMI E119 : JUL 2006(R2012) | MECHANICAL SPECIFICATION FOR REDUCED-PITCH FRONT-OPENING BOX FOR INTERFACTORY TRANSPORT OF 300 MM WAFERS |
| SEMI E87 : 2017 | SPECIFICATION FOR CARRIER MANAGEMENT (CMS) |
| SEMI G82 : 2015 | SPECIFICATION FOR 300 MM LOAD PORT FOR FRAME CASSETTES IN BACKEND PROCESS |
| SEMI E98 : 2009 | PROVISIONAL STANDARD FOR THE OBJECT-BASED EQUIPMENT MODEL (OBEM) |
| SEMI E83 : 2015 | SPECIFICATION FOR PGV MECHANICAL DOCKING FLANGE |
| SEMI E19.4 : 2017 | SPECIFICATION FOR 200 MM STANDARD MECHANICAL INTERFACE (SMIF) |
| SEMI E92 : 2002E(R2015) | SPECIFICATION FOR 300 MM LIGHT WEIGHT AND COMPACT BOX OPENER/LOADER TO TOOL-INTEROPERABILITY STANDARD (BOLTS/LIGHT) |
| SEMI E62 : NOV 2006(R2012) | SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS) |
| SEMI E118 : NOV 2004E | SPECIFICATION FOR WAFER ID READER COMMUNICATION INTERFACE - THE WAFER ID READER FUNCTIONAL STANDARD: CONCEPTS, BEHAVIOR AND SERVICE |
| SEMI E85 : 2008(R2013) | SPECIFICATION FOR PHYSICAL AMHS STOCKER TO INTERBAY TRANSPORT SYSTEM INTEROPERABILITY |
| SEMI E64 : 2005(R2012) | SPECIFICATION FOR 300 MM CART TO SEMI E15.1 DOCKING INTERFACE PORT |
| SEMI E131 : 2004(R2010) | SPECIFICATION FOR THE PHYSICAL INTERFACE OF AN INTEGRATED MEASUREMENT MODULE (IMM) INTO 300 MM TOOLS USING BOLTS-M |
| SEMI E15-1 : 2005(R2010) | SPECIFICATION FOR 300 MM TOOL LOAD PORT |
| SEMI E117 : 2017 | SPECIFICATION FOR RETICLE LOAD PORT |
| SEMI E63 : 2016 | SPECIFICATION FOR 300 MM BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE |
| SEMI E171 : FEB 2016 | SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL) |
| SEMI E47.1 : NOV 2006 | MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS |
| SEMI E101 : 2004(R2010) | GUIDE FOR EFEM FUNCTIONAL STRUCTURE MODEL |
| SEMI E47 : 2001(R2006) | SPECIFICATION FOR 150 MM/200 MM POD HANDLES |
| SEMI E110 : 2002(R2009) | GUIDELINE FOR INDICATOR PLACEMENT ZONE AND SWITCH PLACEMENT VOLUME OF LOAD PORT OPERATION INTERFACE FOR 300 MM LOAD PORTS |
| SEMI E19 : APR 2017 | SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF) |
| SEMI D18 : 1999E | SPECIFICATION FOR CASSETTES USED FOR HORIZONTAL TRANSPORT AND STORAGE OF FLAT PANEL DISPLAY SUBSTRATES |
| SEMI E103 : 2004 | MECHANICAL SPECIFICATION FOR A 300 MM SINGLE-WAFER BOX SYSTEM THAT EMULATES A FOUP |
| SEMI E1-9 : NOV 2006E | MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS |
| SEMI E48 : 2001(R2007) | SPECIFICATION FOR SMIF INDEXER VOLUME REQUIREMENT |
| SEMI T4 : 2001(R2013) | SPECIFICATION FOR 150 MM AND 200 MM POD IDENTIFICATION DIMENSIONS |
| SEMI E19 : APR 2017 | SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF) |
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