SEMI E106 : 2004
Withdrawn
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS
Withdrawn date
01-07-2010
Published date
12-01-2013
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Assists users and suppliers of 300 mm carriers and production equipment to understand the complex interdependencies among the SEMI standards for 300 mm physical interfaces and carriers and to determine which standards apply to which products.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Withdrawn
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| SEMI E6 : 2014 | GUIDE FOR SEMICONDUCTOR EQUIPMENT INSTALLATION DOCUMENTATION |
| SEMI E19.4 : 2017 | SPECIFICATION FOR 200 MM STANDARD MECHANICAL INTERFACE (SMIF) |
| SEMI E45 : NOV 2001(R2007) | TEST METHOD FOR THE DETERMINATION OF INORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING VAPOR PHASE DECOMPOSITION-TOTAL REFLECTION X-RAY SPECTROSCOPY (VPD-TXRF) AND VAPOR PHASE DECOMPOSITION-ATOMIC ABSORPTION SPECTROSCOPY (VPD/ICP-MS) |
| SEMI E46 : 2007 | TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS) |
| SEMI G74 : 1999(R2015) | SPECIFICATION FOR TAPE FRAME FOR 300 MM WAFERS |
| SEMI E92 : 2002E(R2015) | SPECIFICATION FOR 300 MM LIGHT WEIGHT AND COMPACT BOX OPENER/LOADER TO TOOL-INTEROPERABILITY STANDARD (BOLTS/LIGHT) |
| SEMI E64 : 2005(R2012) | SPECIFICATION FOR 300 MM CART TO SEMI E15.1 DOCKING INTERFACE PORT |
| SEMI E10 : 2014E | SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION |
| SEMI S11 : 1996 | ENVIRONMENTAL SAFETY, AND HEALTH GUIDELINES FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT MINIENVIRONMENTS |
| SEMI E99.1 : 2004(R2010) | SPECIFICATION FOR SECS-1 AND SECS-2 PROTOCOL FOR CARRIER ID READER/WRITER FUNCTIONAL STANDARD |
| SEMI S2 : 2016B | ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI E1-9 : NOV 2006E | MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS |
| SEMI E19 : APR 2017 | SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF) |
| SEMI E72 : 2016 | SPECIFICATION AND GUIDE FOR 300 MM EQUIPMENT FOOTPRINT, HEIGHT, AND WEIGHT |
| SEMI E151 : 2011(R2017) | GUIDE FOR UNDERSTANDING DATA QUALITY |
| SEMI E99 : 2017 | SPECIFICATION FOR CARRIER ID READER/WRITER |
| SEMI E62 : NOV 2006(R2012) | SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS) |
| SEMI E63 : 2016 | SPECIFICATION FOR 300 MM BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE |
| SEMI E57 : 2000E2(R2010) | SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS |
| SEMI E100 : 2004(R2010) | SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 MM RETICLES |
| SEMI G77 : 1999(R2015) | SPECIFICATION FOR FRAME CASSETTE FOR 300 MM WAFERS |
| SEMI E23 : 2004(R2010) | SPECIFICATION FOR CASSETTE TRANSFER PARALLEL I/O INTERFACE |
| SEMI M31 : 2008 | MECHANICAL SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 300 MM WAFERS |
| SEMI M28 : 1997 | SPECIFICATION FOR DEVELOPMENTAL 300 MM DIAMETER POLISHED SINGLE CRYSTAL SILICON WAFERS |
| SEMI E101 : 2004(R2010) | GUIDE FOR EFEM FUNCTIONAL STRUCTURE MODEL |
| SEMI E83 : 2015 | SPECIFICATION FOR PGV MECHANICAL DOCKING FLANGE |
| SEMI M8 : 2012 | SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON TEST WAFERS |
| SEMI E15 : 1998E2(R2016) | SPECIFICATION FOR TOOL LOAD PORT |
| SEMI E22.1 : 2015 | SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE 300 MM: TRANSPORT MODULE END EFFECTOR EXCLUSION VOLUME |
| SEMI E21.1 : 2015 | SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE 300 MM: MECHANICAL INTERFACE AND WAFER TRANSPORT |
| SEMI E47.1 : NOV 2006 | MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS |
| SEMI M29 : 1996(R2010) | SPECIFICATION FOR 300 MM SHIPPING BOX |
| SEMI E103 : 2004 | MECHANICAL SPECIFICATION FOR A 300 MM SINGLE-WAFER BOX SYSTEM THAT EMULATES A FOUP |
| SEMI E25 : 92(R1999) | CLUSTER TOOL MODULE INTERFACE: MODULE ACCESS GUIDELINE |
| SEMI E70 : 2013 | GUIDE FOR TOOL ACCOMMODATION PROCESS |
| SEMI E85 : 2008(R2013) | SPECIFICATION FOR PHYSICAL AMHS STOCKER TO INTERBAY TRANSPORT SYSTEM INTEROPERABILITY |
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